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Date of decision 12 June 2003
Case number T 0937/00 - 3.4.2
Application number 92302512.6
IPC G03B27/53, G03F9/00, G03F7/20
Proceedings Language EN
Title of the application Optical projection exposure method and system using the same
Applicant name NIPPON TELEGRAPH AND TELEPHONE CORPORATION
Opponent name Firma Carl Zeiss
Headnote
-
Articles and Rules EPC . Art 104
. R 63
Keywords
Multiple independent claims filed in response to the notice of opposition and subsequent amendments
Apportionment of costs (yes)
Cited Decisions -
Catchwords:
-

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