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Date of decision 09 May 2006
Case number T 0051/04 - 3.5.01
Application number 99966428.7
IPC G06F17/50, G03F1/00, G03F7/20
Proceedings Language EN
Title of the application Mechanisms for making and inspecting reticles
Applicant name KLA-Tencor Corporation
Opponent name -
Headnote
-
Articles and Rules EPC . Art 56
Keywords
Inventive step (no)
Cited Decisions -
Catchwords:
-

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