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EPO boards of appeal decision

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Date of decision: 06 June 2007

Case number: T 1073/04 - 3.4.03

Application number: 99307842.7

IPC class: G03F7/20

Proceedings language: EN

Title of the application
Projection exposure apparatus, and device manufacturing method
Applicant name
CANON KABUSHIKI KAISHA
Opponent name
-
Headnote
-
Articles and rules
EPC Art 56
Keywords
Inventive step (no)
Cited decisions
-
Catchwords
-
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