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EPO boards of appeal decision

Date of decision

09 January 2008

Case number

T 0564/05 - 3.4.03

Application number

96936061.9

IPC

H01L21/68

Proceedings Language

Title of the application

Electrostatic clamping method and apparatus for dielectric workpieces in vacuum processors

Applicant name

LAM RESEARCH CORPORATION

Opponent name

Headnote

-

Articles and Rules

EPC . Art 52(1)
. Art 56

Keywords

Inventive step (no)
Remittal to examining division (no)

Cited Decisions

G 0010/93

Catchwords:

See reasons 3 and 4

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