EPO logo
EPO boards of appeal decisions
homepage => search & index => boards of appeal decisions
Search mask List of updates
Date of decision 28 November 2006
Case number T 0566/05 - 3.4.03
Application number 98304002.3
IPC H01L21/321
Proceedings Language EN
Title of the application System and method of selectively cleaning copper substrate surfaces, in-situ, to remove copper oxides
Applicant name SHARP KABUSHIKI KAISHA, et al
Opponent name -
Headnote
-
Articles and Rules EPC . Art 56
Keywords
Inventive step (no)
Cited Decisions -
Catchwords:
-

get the full pdf
 
EPO Home Page | Recent updates | Request info | Send comments | Index
Patent information on the internet

Copyright © 1997-2006 European Patent Office . All Rights Reserved.
E-mail: EPO Mail Distribution