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EPO boards of appeal decision
Date of decision: 17 October 2007
Case number: T 0892/05 - 3.4.03
Application number: 02258293.6
IPC class: G03F7/20
Proceedings language: EN
| Title of the application Lithographic apparatus, device manufacturing method, and method of manufacturing an optical element |
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| Applicant name ASML Netherlands B.V. |
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| Opponent name - |
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| Headnote - |
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| Articles and rules EPC Art 54 |
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| Keywords Novelty (yes) Inventive step (yes) | |
| Cited decisions T 0943/93 T 0464/94 | |
| Catchwords - |
