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Date of decision
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11 January 2008
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Case number
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T 0468/07
- 3.4.02
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Application number
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96402130.7
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Title of the application
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Method of detecting a gas phase molecular species in the chamber
effluent of a semiconductor processing chamber, and semiconductor
processing system incorporating the same
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Applicant name
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L'AIR LIQUIDE, Société Anonyme pour l'Etude
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Opponent name
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FRAUNHOFER-GESELLSCHAFT zur Förderung der angewandten Forschung
e.V.
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Keywords
Missing statement of grounds
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